An investigation for the nonlinear effects of squeeze film damping and electrostatic forces on the shock spectrum of a capacitive accelerometer

Mahmoud I. Ibrahim*, Mohammad I. Younis

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

This paper presents a theoretical and experimental investigation on the effects of squeeze film damping and electrostatic forces on the shock spectrum of a capacitive accelerometer. For the theoretical part, a single-degree-of- freedom system is used to model the device. Simulation results are demonstrated in a series of shock spectra that help indicate the nonlinear effects on the motion of a MEMS device. When squeeze-film effects are absent, the electrostatic forces soften the microstructure and increase its deflection significantly. A range of shock durations was found in which the microstructure experiences pull-in (pull-in zone). Larger pull-in zones are obtained as we raise the electrostatic force. On the other hand, the presence of squeeze film highly suppresses the deflection of the microstructure in the dynamic range and has minor effects in the quasi-static range. It is found in the other case that the microstructure experiences pull-in in the quasi-static range. Simulation results are compared to experimental data, showing excellent agreement.

Original languageEnglish (US)
Title of host publicationASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2008
Pages573-580
Number of pages8
Volume4
DOIs
StatePublished - 2008
Externally publishedYes
EventASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2008 - Brooklyn, NY, United States
Duration: Aug 3 2008Aug 6 2008

Other

OtherASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2008
CountryUnited States
CityBrooklyn, NY
Period08/3/0808/6/08

ASJC Scopus subject areas

  • Modeling and Simulation
  • Mechanical Engineering
  • Computer Science Applications
  • Computer Graphics and Computer-Aided Design

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