An integrated photonic MEMS switch system with fast switching speed and low power demand

E. H. Khoo, Jingqi Li, H. Cai, D. Pinjala, A. Q. Liu

    Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

    2 Scopus citations

    Abstract

    This paper presents an integrated photonic MEMS switching system. The switching system consist of two perpendicular photonic crystal (PC) surface waveguide joined together to form a waveguide bend. An elliptical micro-mirror driven by a comb drive actuator is positioned with its foci at the end cells of the waveguide bend to provide the switching mechanism. When the position of the mirror is displaced, the propagation path of lightwaves from one waveguide to another is affected and this forms a switching system. This switching system has the advantages of fast switching speed of ∼ 20 μs. a higher device density with an overall system size of ∼ 10 μm × 10 μm compared with other MEMS switches.

    Original languageEnglish (US)
    Title of host publicationTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
    Pages1449-1452
    Number of pages4
    DOIs
    StatePublished - Dec 1 2007
    Event4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France
    Duration: Jun 10 2007Jun 14 2007

    Publication series

    NameTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

    Other

    Other4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
    CountryFrance
    CityLyon
    Period06/10/0706/14/07

    Keywords

    • Elliptical
    • Micro-mirror
    • Microelectromechanical system (MEMS)
    • Photonic crystal
    • Switch

    ASJC Scopus subject areas

    • Control and Systems Engineering
    • Electrical and Electronic Engineering

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