An imperfect microbeam electrically actuated: Experimental investigation and parameter identification

Laura Ruzziconi, Ahmad M. Bataineh, Mohammad Younis, Stefano Lenci

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

In this study we present a theoretical and experimental investigation of a microelectromechanical system (MEMS). The device is constituted of a clamped-clamped polysilicon microbeam electrostatically and electrodynamically actuated. The microbeam has imperfections in the geometry, which are related to the microfabrication process. Using a laser Doppler vibrometer, experimental testing based on forward and backward sweeps is conducted in a neighborhood of the first symmetric natural frequency. Our aim is that of introducing a simple mechanical model, which, despite the inevitable approximations, is able to catch and predict the most relevant aspects of the device response. Many parameters of the microbeam are unknown. Their values are identified by developing a parametric analysis, which is based on matching the experimental natural frequencies and the experimental frequency response diagrams. Extensive simulations are performed. Theoretical and experimental frequency responses are analyzed in detail at increasing values of electrodynamic excitation. A satisfactory concurrence of results is achieved, not only at low electrodynamic loads, but also at higher ones, when the escape (dynamic pull-in) becomes impending. This confirms that, despite the apparent simplicity, the proposed theoretical model is able to simulate the complex dynamics of the device accurately and properly. Keywords: microelectromechanical systems;parameter identification;frequency response;nonlinear dynamics.

Original languageEnglish (US)
Title of host publicationASME 2012 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2012
Pages87-94
Number of pages8
DOIs
StatePublished - Dec 1 2012
EventASME 2012 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2012 - Chicago, IL, United States
Duration: Aug 12 2012Aug 12 2012

Publication series

NameProceedings of the ASME Design Engineering Technical Conference
Volume5

Other

OtherASME 2012 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2012
CountryUnited States
CityChicago, IL
Period08/12/1208/12/12

ASJC Scopus subject areas

  • Mechanical Engineering
  • Computer Graphics and Computer-Aided Design
  • Computer Science Applications
  • Modeling and Simulation

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