An Experimental and Theoretical Investigation of Double Resonance Activation in Electrostatic MEMS Resonators

Mohammad H. Hasan, Hassen M. Ouakad, Nizar Jaber, Md Abdullah Al Hafiz, Fadi Alsaleem, Mohammad I. Younis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Electrostatic micro-electro-mechanical-system (MEMS) devices show great potential in a variety of applications such as sensing and actuation; however, they are hindered by their high input voltage requirement. Double resonance excitation, which activates the system’s mechanical and electrical resonances simultaneously, was recently demonstrated experimentally to alleviate this problem. In this work, we present a mathematical model, based on the Euler Bernoulli beam model coupled with a circuit model, to simulate double resonance in MEMS devices and to shed light more onto the previously published experimental data. We show good agreement between the theoretical simulation and experimental data when the electrical resonance frequency band is sufficiently high.
Original languageEnglish (US)
Title of host publicationVolume 4: 23rd Design for Manufacturing and the Life Cycle Conference; 12th International Conference on Micro- and Nanosystems
PublisherASME International
ISBN (Print)9780791851791
DOIs
StatePublished - Nov 2 2018

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