An enhanced 90nm high performance technology with strong performance improvements from stress and mobility increase through simple process changes

R. Khamankar*, H. Bu, C. Bowen, S. Chakravarthi, P. R. Chidambaram, M. Bevan, A. Krishnan, H. Niimi, B. Smith, J. Blatchford, B. Hornung, J. P. Lu, P. Nicollian, B. Kirkpatrick, D. Miles, M. Hewson, D. Farber, L. Hall, Husam Niman Alshareef, A. VargheseA. Gurba, V. Ukraintsev, B. Rathsack, J. DeLoach, J. Tran, C. Kaneshige, M. Somervell, S. Aur, C. Machala, T. Grider

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

20 Scopus citations

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Engineering & Materials Science