An electrothermally actuated bi-axis scanning micromirror for medical imaging applications

U. Izhar*, Boon Ooi, S. Tatic-Lucic

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Scopus citations

Abstract

We present the design, fabrication and initial characterization results of a novel electrothermal micromirror. Deflection angle of up to 20° at input power of 14mW with temperature of less than 100°C was observed.

Original languageEnglish (US)
Title of host publication2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
Pages53-54
Number of pages2
DOIs
StatePublished - Dec 17 2009
Event2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 - Clearwater, FL, United States
Duration: Aug 17 2009Aug 20 2009

Publication series

Name2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009

Other

Other2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
CountryUnited States
CityClearwater, FL
Period08/17/0908/20/09

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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