Adsorption and electron-induced polymerization of methyl methacrylate on Ru (10 10)

Mohamed Nejib Hedhili, B. V. Yakshinskiy, R. Wasielewski, A. Ciszewski, T. E. Madey

    Research output: Contribution to journalArticlepeer-review

    11 Scopus citations

    Abstract

    The adsorption and electron irradiation of methyl methacrylate (MMA) on a Ru (10 1- 0) surface have been studied using x-ray photoelectron spectroscopy (XPS), temperature programmed desorption (TPD), and low energy ion scattering. TPD analysis indicates that a monolayer of MMA chemisorbs and dissociates on the Ru (10 1- 0) surface. The reaction products observed upon heating include H2, CO, C O2, and a small amount of MMA. Physisorbed multilayers of MMA desorb at temperatures around 170 K. Electron irradiation of physisorbed MMA at 140 K leads to a modification of the MMA film: The XPS spectra show an increase in thermal stability of the film with retention of the MMA structure, and indicate that electron irradiation induces polymerization. An increase in the electron bombardment fluence induces a degradation of the formed polymerized species and leads to the accumulation of carbon on the Ru surface. These results are relevant to the accumulation of carbon on surfaces of Ru films that serve as capping layers on MoSi multilayer mirrors used in extreme ultraviolet lithography.

    Original languageEnglish (US)
    Article number174704
    JournalJournal of Chemical Physics
    Volume128
    Issue number17
    DOIs
    StatePublished - May 14 2008

    ASJC Scopus subject areas

    • Physics and Astronomy(all)
    • Physical and Theoretical Chemistry

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