A top-contacted extraordinary magnetoresistance sensor fabricated with an unpatterned semiconductor epilayer

Jian Sun, Jürgen Kosel

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Abstract

An extraordinary magnetoresistance device is developed from an unpatterned semiconductor epilayer onto which the metal contacts are fabricated. Compared with conventionally fabricated devices, for which semiconductor patterning and precise alignment are required, this design is not only easier from a technological point of view, but it also has the potential to reduce damage introduced to the semiconductor during fabrication. The device shows a similar magnetoresistance ratio as a conventional one but it has a lower sensitivity. Because of the reduced resistance, and hence less noise, high magnetic field resolution is maintained. © 1980-2012 IEEE.
Original languageEnglish (US)
Pages (from-to)547-549
Number of pages3
JournalIEEE Electron Device Letters
Volume34
Issue number4
DOIs
StatePublished - Apr 2013

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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