A thin film passive magnetic field sensor operated at 425 MHz

Bodong Li, Jürgen Kosel

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Abstract

A passive, magnetic field sensor consisting of a 425 MHz surface acoustic wave (SAW) transponder loaded with a giant magnetoimpedance (GMI) element is developed. The transponder, consisting of two interdigital transducers (IDTs) and the GMI element, a multilayer structure composed of Ni80Fe 20/Cu/Ni80Fe20, are fabricated on a 128° Y-X cut LiNbO3 substrate. The integrated sensor is characterized with a network analyzer through an S-parameter measurement. Upon the application of a magnetic field, a maximum amplitude change and phase shift of 2.7 dB and 20 degree, respectively, are observed. Within the linear region, the magnetic sensitivity is 3870 dB/T and the resolution is 1.3 μT. © 2013 IEEE.
Original languageEnglish (US)
Title of host publication2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages466-469
Number of pages4
ISBN (Print)9781467359818
DOIs
StatePublished - Jun 2013

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