A thin-film coating apparatus and methods of forming a thin-film coating

Maged Abdelmonem ABDELSAMIE (Inventor), Aram Amassian (Inventor)

Research output: Patent

Abstract

Embodiments of the present disclosure describe an apparatus for thin film coating comprising a coating device configured to deposit a solution on a substrate; and a dryer component configured to spin gas proximate to the deposited solution to dry the deposited solution and form a thin film coating. Embodiments of the present disclosure further describe a method of forming a thin-film coating comprising depositing a solution on a substrate and spinning a gas proximate to the deposited solution to dry the deposited solution and form a thin film coating.
Original languageEnglish (US)
Patent numberWO2018092067A1
StatePublished - May 24 2018

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