A thermally responsive polymer microvalve without mechanical parts photo-patterned in a parylene channel

S. Mutlu, Cong Yu, F. Svec, C. H. Mastrangelo, Jean Frechet, Y. B. Gianchandani

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

15 Scopus citations

Abstract

A photoresist-like thermally responsive polymer has been formulated, surface micromachined and integrated into parylene microchannels to realize an inline valve. The polymer physically swells below its lower critical solution temperature and shrinks above it. Test showed a 2.5-fold polymer volume increase by changing water temperature from 25 to 10°C. Repeated polymer swelling and shrinking were observed inside the channel with a system response time around 7 s. Pressure build-up measurements were used to demonstrate the functionality of the valve. Valve test results using DI water showed that the pressure upstream of the polymer plug increased from 15.3 to 20.3 psi with temperature change from 36°C to 15°C.

Original languageEnglish (US)
Title of host publicationTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages802-805
Number of pages4
ISBN (Electronic)0780377311, 9780780377318
DOIs
StatePublished - Jan 1 2003
Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
Duration: Jun 8 2003Jun 12 2003

Publication series

NameTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Volume1

Other

Other12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
CountryUnited States
CityBoston
Period06/8/0306/12/03

Keywords

  • Casting
  • Coatings
  • Fabrication
  • Microchannel
  • Microvalves
  • Polymer films
  • Temperature sensors
  • Thin film sensors
  • Valves
  • Viscosity

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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