In this paper, we report an integrated single-chip surface acoustic wave sensor with the capability of measuring magnetic field, temperature, and humidity. The sensor is fabricated using a thermally sensitive LiNbO3 substrate, a humidity sensitive hydrogel coating, and a magnetic field sensitive impedance load. The sensor response to individually and simultaneously changing magnetic field, temperature and humidity is characterized by connecting a network analyzer directly to the sensor. Analytical models for each measurand are derived and used to compensate noise due to cross sensitivities. The results show that all three measurands can be monitored in parallel with sensitivities of 75 ppm/°C, 0.13 dB/%R.H. (at 50%R.H.), 0.18 dB/Oe and resolutions of 0.1 °C, 0.4%R.H., 1 Oe for temperature, humidity and magnetic field, respectively. A passive wireless measurement is also conducted on a current line using, which shows the sensors capability to measure both temperature and current signals simultaneously.
ASJC Scopus subject areas
- Electrical and Electronic Engineering