A smart microelectromechanical sensor and switch triggered by gas

Adam M. Bouchaala, Nizar Jaber, Osama Shekhah, Valeriya Chernikova, Mohamed Eddaoudi, Mohammad I. Younis

Research output: Contribution to journalArticlepeer-review

26 Scopus citations

Abstract

There is an increasing interest to realize smarter sensors and actuators that can deliver a multitude of sophisticated functionalities while being compact in size and of low cost. We report here combining both sensing and actuation on the same device based on a single microstructure. Specifically, we demonstrate a smart resonant gas (mass) sensor, which in addition to being capable of quantifying the amount of absorbed gas, can be autonomously triggered as an electrical switch upon exceeding a preset threshold of absorbed gas. Toward this, an electrostatically actuated polymer microbeam is fabricated and is then functionalized with a metal-organic framework, namely, HKUST-1. The microbeam is demonstrated to absorb vapors up to a certain threshold, after which is shown to collapse through the dynamic pull-in instability. Upon pull-in, the microstructure can be made to act as an electrical switch to achieve desirable actions, such as alarming.
Original languageEnglish (US)
Pages (from-to)013502
JournalApplied Physics Letters
Volume109
Issue number1
DOIs
StatePublished - Jul 5 2016

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