A sensitive resonant gas sensor based on multimode excitation of a buckled beam

Amal Hajjaj, Nizar Jaber, Nouha Alcheikh, Mohammad I. Younis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The quest for ultra-sensitive low-cost miniaturized gas sensors in the past few decades has sparked interest to seek alternative approaches other than the conventional gas sensors that need large surface areas and special chemicals for functionalization. MEMS thermal conductivity based gas sensors [1, 2] have been shown to be among the promising candidates since they do not rely on gas absorption or chemical reactions. These sensors show long lifetime and great stability compared to conventional gas sensor. The thermal conductivity based gas sensors rely on the resistance variation of the heated structures due to gas exposure [1]. Typical values of resistance changes are less than few percent. Here, we present a thermal conductivity based gas sensor relying on frequency shifts of an electrothermally heated bridge operated near the buckling point, which leads to ultra-high sensitivity.
Original languageEnglish (US)
Title of host publicationVolume 4: 24th Design for Manufacturing and the Life Cycle Conference; 13th International Conference on Micro- and Nanosystems
PublisherAmerican Society of Mechanical Engineers
ISBN (Print)9780791859223
DOIs
StatePublished - Nov 25 2019

Fingerprint Dive into the research topics of 'A sensitive resonant gas sensor based on multimode excitation of a buckled beam'. Together they form a unique fingerprint.

Cite this