A self-limited large-displacement-ratio micromechanical amplifier

Jingqi Li, Z. S. Liu, C. Lu, Q. X. Zhang, A. Q. Liu*

*Corresponding author for this work

    Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

    3 Scopus citations

    Abstract

    A micromechanical amplifier with large-displacement-ratio and self-limited output as a result of bifurcation effect is reported in this paper. The large output displacement is achieved by amplifying a small input motion through the elastic deformation of the compliant configuration, which realizes the self-limited output by bifurcation effect. The configuration of the compliant microstructures is analyzed with the results of as high as 100 times displacement magnification and self-limitation by bifurcation effect, Such kind of amplifier is fabricated by employing deep reactive ion etching (DRIE) process demonstrating the 52.0-μm-output displacement when the input displacement is only 0.96 um with the displacement ratio of 54.2. Thereafter, the output displacement maintains stable due to the bifurcation effect.

    Original languageEnglish (US)
    Title of host publicationTRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
    Pages725-728
    Number of pages4
    DOIs
    StatePublished - Nov 9 2005
    Event13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of
    Duration: Jun 5 2005Jun 9 2005

    Publication series

    NameDigest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
    Volume1

    Other

    Other13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
    CountryKorea, Republic of
    CitySeoul
    Period06/5/0506/9/05

    Keywords

    • Bifurcation effect
    • Large displacement ratio
    • Micromechanical amplifier
    • Self-Limited

    ASJC Scopus subject areas

    • Engineering(all)

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