A Miniaturized Force Sensor Based on Hair-Like Flexible Magnetized Cylinders Deposited Over a Giant Magnetoresistive Sensor

Pedro Ribeiro, Mohammed Asadullah Khan, Ahmed Alfadhel, Jürgen Kosel, Fernando Franco, Susana Cardoso, Alexandre Bernardino, Jose Santos-Victor, Lorenzo Jamone

Research output: Contribution to journalArticlepeer-review

Abstract

The detection of force with higher resolution than observed in humans (similar to 1 mN) is of great interest for emerging technologies, especially surgical robots, since this level of resolution could allow these devices to operate in extremely sensitive environments without harming these. In this paper, we present a force sensor fabricated with a miniaturized footprint (9 mm(2)), based on the detection of the magnetic field generated by magnetized flexible pillars over a giant magnetoresistive sensor. When these flexible pillars deflect due to external loads, the stray field emitted by these will change, thus varying the GMR sensor resistance. A sensor with an array of five pillars with 200 mu m diameter and 1 mm height was fabricated, achieving a 0 to 26 mN measurement range and capable of detecting a minimum force feature of 630 mu N. A simulation model to predict the distribution of magnetic field generated by the flexible pillars on the sensitive area of the GMR sensor in function of the applied force was developed and validated against the experimental results reported in this paper. The sensor was finally tested as a texture classification system, with the ability of differentiating between four distinct surfaces varying between 0 and 162 mu m root mean square surface roughness.
Original languageEnglish (US)
Pages (from-to)1-5
Number of pages5
JournalIEEE Transactions on Magnetics
Volume53
Issue number11
DOIs
StatePublished - Jun 13 2017

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