A macromodel for squeeze-film air damping in the free-molecule regime

Gang Hong, Wenjing Ye

Research output: Contribution to journalArticlepeer-review

6 Scopus citations

Abstract

A three-dimensional Monte Carlo(MC) simulation approach is developed for the accurate prediction of the squeeze-film air damping on microresonators in the free-molecule gas regime. Based on the MC simulations and the analytical traveling-time distribution, a macromodel, which relates air damping directly with device dimensions and operation parameters, is constructed. This model provides an efficient tool for the design of high-performance microresonators. The accuracy of the macromodel is validated through the modeling of the quality factors of several microresonators. It has been found that the relative errors of the quality factors of two resonators, as compared with experimental data, are 3.9% and 5.7%, respectively. The agreements between the macromodel results and MC simulation results, on the other hand, are excellent in all cases considered.
Original languageEnglish (US)
Pages (from-to)012001
JournalPhysics of Fluids
Volume22
Issue number1
DOIs
StatePublished - Jan 8 2010

ASJC Scopus subject areas

  • Condensed Matter Physics

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