A combined ElectroWetting on Dielectrics superhydrophobic platform based on silicon micro-structured pillars

Angelo Accardo*, Francesco Gentile, Maria Laura Coluccio, Federico Mecarini, Francesco De Angelis, Enzo Di Fabrizio

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Abstract

A simple and ready to use approach for combining silicon superhydrophobic surfaces with ElectroWetting On Dielectrics (EWOD) phenomenon is presented. The substrate is fabricated using a two-phases process, where a first optical lithography step is used to define the position of the micro-pillars and a second one exploits the characteristics of reactive ion etch Bosch technique. The fabricated substrate has been then coupled with a micro-manipulator tip to show the local changes mechanism of contact angle by applying very low DC voltages in the range from 5 to 30 V. The device can be of interest for a wide variety of microfluidics applications related to the biomedical field.

Original languageEnglish (US)
Pages (from-to)651-654
Number of pages4
JournalMicroelectronic Engineering
Volume98
DOIs
StatePublished - Oct 1 2012

Keywords

  • EWOD
  • Micromanipulator
  • Micropillars
  • Silicon
  • Superhydrophobicity

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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