We report CMOS technology enabled fabrication and system level integration of flexible bulk silicon (100) based multi-sensors platform which can simultaneously sense pressure, temperature, strain and humidity under various physical deformations. We also show an advanced wearable version for body vital monitoring which can enable advanced healthcare for IoT applications.
|Original language||English (US)|
|Title of host publication||2016 IEEE International Electron Devices Meeting (IEDM)|
|Publisher||Institute of Electrical and Electronics Engineers (IEEE)|
|Number of pages||1|
|State||Published - Feb 7 2017|