A CMOS-compatible large-scale monolithic integration of heterogeneous multi-sensors on flexible silicon for IoT applications

Joanna M. Nassar, Galo T. Sevilla, Seneca J. Velling, Marlon Diaz, Muhammad Mustafa Hussain

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Scopus citations

Abstract

We report CMOS technology enabled fabrication and system level integration of flexible bulk silicon (100) based multi-sensors platform which can simultaneously sense pressure, temperature, strain and humidity under various physical deformations. We also show an advanced wearable version for body vital monitoring which can enable advanced healthcare for IoT applications.
Original languageEnglish (US)
Title of host publication2016 IEEE International Electron Devices Meeting (IEDM)
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages18.6.1-18.6.4
Number of pages1
ISBN (Print)9781509039029
DOIs
StatePublished - Feb 7 2017

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