Chemical Assisted Ion Beam Etch

    Gheorghe Iordache (Manager)

Equipment/facility: Equipment

  • Location

    King Abdullah University of Science and Technology Thuwal 23955

    Saudi Arabia

Equipments Details

Description

Ion beam etching together with chemical etching using Argon ion beam milling with chlorine and fluorine gas inlet.
Model: Oxford Instruments IonFab 300 Plus
Photo associated with equipment

Details

NameChemical Assisted Ion Beam Etch
Acquisition date04/1/10
ManufacturersOxford Instruments Group Plc

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